发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device capable of improving the reliability.SOLUTION: A semiconductor device includes a first electrode, a second electrode, a third electrode, and a nitride semiconductor layer. The first electrode includes a first surface. The second electrode includes a second surface. On the second surface, at least any one of a plurality of convex parts and a plurality of recessed parts are provided. The second electrode is provided to be separated from the first electrode in a first direction. The third electrode is provided to be separated from the first electrode in a second direction crossing the first direction. The nitride semiconductor layer is provided between the first surface and the second surface and between the third electrode and the second surface.SELECTED DRAWING: Figure 1
申请公布号 JP2016058648(A) 申请公布日期 2016.04.21
申请号 JP20140185571 申请日期 2014.09.11
申请人 TOSHIBA CORP 发明人 YASUMOTO YASUAKI;YANASE NAOKO;ABE KAZUHIDE;UCHIHARA TSUKASA;SAITO YASUNOBU;FUJIMOTO HIDETOSHI;FURUKAWA MASARU;YAGI YASUNARI;YUMOTO MIKI;IIDA ATSUKO;MURAKAMI YUKAKO
分类号 H01L21/337;H01L21/28;H01L21/338;H01L29/12;H01L29/778;H01L29/78;H01L29/786;H01L29/808;H01L29/812 主分类号 H01L21/337
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