X-RAY THIN FILM INSPECTION DEVICE

摘要

This x-ray thin film inspection device is provided with: an x-ray irradiation unit (40) that is mounted on a first turning arm (32); an x-ray detector (50) that is mounted on a second turning arm (33); an x-ray fluorescence detector (60) that detects x-ray fluorescence that is generated from an inspection target due to x-ray irradiation; a temperature measurement unit (110) that measures a temperature that corresponds to the temperature of the x-ray thin film inspection device; and a temperature correction system (a central processing device (100)) that corrects an inspection position on the basis of the temperature measured by the temperature measurement unit (110).