METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To manage an etching rate with ease and at low cost.SOLUTION: A method of manufacturing of a semiconductor device according to an embodiment includes a step of processing a plurality of substrates each comprising an etched object, with medical fluid. The medical fluid is repeatedly used, and an etching rate of the medical fluid is adjusted by being added with water.SELECTED DRAWING: Figure 1