PHOTONICS GRATING COUPLER AND METHOD OF MANUFACTURE

摘要

A structure for coupling an optical signal between an integrated circuit photonic structure and an external optical fiber is disclosed as in a method of formation. The coupling structure is sloped relative to a horizontal surface of the photonic structure such that light entering or leaving the photonic structure is substantially normal to its upper surface.

主权项

1. A method of forming a photonic structure, the method comprising:
forming a lower cladding material over an upper surface of a supporting substrate; forming a waveguide core having a horizontal portion and a contiguous sloped portion over the lower cladding material; and forming an optical grating in the sloped portion of the waveguide core, the sloped portion and the optical grating configured such that light emitted by the grating is in a direction substantially normal to a surface of the horizontal portion of the waveguide core.