| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a vibration device with small vibration loss and high detection sensitivity.SOLUTION: A method for manufacturing a vibration device 1 includes the steps of: preparing a vibration element 100 comprising a base part (a first base part 110 and a second base part 120), a vibration arm 140 extending from the base part (110, 120) and a fixed arm 150 connected to the base part (110, 120)and including a fixed part 160 (preparing step); bonding the base part (110, 120) and the fixed part 160 onto a base 10 via a bonding member 90 (bonding step); and separating the fixed arm 150 and the base part (110, 120) after bonding (separating step).SELECTED DRAWING: Figure 6 |
