| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element utilization device capable of preventing a movable film from being cracked by a stress of wiring.SOLUTION: An ink jet print head 1 includes a pressure chamber (cavity) 5, a movable film 10A that partitions a top face of the pressure chamber 5, and a piezoelectric element 9 disposed on the movable film 10A. The piezoelectric element 9 includes: a lower electrode 11 formed on the movable film 10A; a piezoelectric film 12 formed on the lower electrode 11; and an upper electrode 13 formed on the piezoelectric film 12. One end of upper wiring 17 is connected to a top face of the upper electrode 13. The upper wiring 17 extends from an upper side of the upper electrode 13 to the outside of the pressure chamber 5 across an outer edge of the pressure chamber 5. The piezoelectric film 12 includes: an active part 12A of which the top face is in contact with a bottom face of the upper electrode 13; and an inactive part 12B which extends from one end of the active part 12A to the outside of the pressure chamber 5 along a bottom face of the upper wiring 17.SELECTED DRAWING: Figure 2B |
