| 摘要 |
PROBLEM TO BE SOLVED: To provide an analyzer capable of efficiently performing a failure analysis on a semiconductor element or liquid crystal display device etc.SOLUTION: The analyzer 11 includes: an acquisition section that acquires a data which represents the inside of a measurement sample 12; an identification section that identifies the position of failure on the measurement sample based on the data; and a marking section 20 that marks the position corresponding to the position of the failure on the surface of the measurement sample.SELECTED DRAWING: Figure 1 |
