| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor element having excellent detection accuracy, and to provide a physical quantity sensor, an electronic apparatus, and a mobile entity equipped with the physical quantity sensor element.SOLUTION: A physical quantity sensor element 1 according to the present invention comprises a detection part 21, a drive part 24, and a beam part 25 connecting the detection part 21 and the drive part 24, the beam part 25 having a branched portion. The beam part 25 has two mass part side beam parts extending from two mutually different positions of the drive part 24 and two support part side beam parts extending from two mutually different positions of the detection part 21, the ends on the detection part 21 side of the two mass part side beam parts being connected with each other and the ends on the drive part 24 side of the two support part side beam parts being connected with each other.SELECTED DRAWING: Figure 1 |
