| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology that is advantageous in terms of overlay accuracy.SOLUTION: A detection device is configured to detect both an original plate mark on an original plate or an original plate reference member and a substrate mark on a substrate or a substrate reference member, which are disposed across a projection optical system. The detection device includes an imaging section and an optical system which forms an image of the original plate mark and an image of the substrate mark on the imaging section. The optical system includes a detection reference member including a first mark and a second mark. The optical system forms an image of the first mark on the original plate or the original plate reference member, forms an image of the second mark on the substrate or the substrate reference member via the original plate or the original plate reference member and the projection optical system, and forms the image of the original plate mark, the image of the substrate mark, the image of the first mark and the image of the second mark on the imaging section.SELECTED DRAWING: Figure 1 |
