Application of Fluids to Substrates

摘要

Various embodiments relate to application of a fluid to a substrate. The fluid is locally heated, for example, to obtain a desired thickness profile.

主权项

1. An apparatus comprising:
a substrate holder; a fluid application device configured to apply a fluid to a substrate on the substrate holder; a heating mechanism configured to locally heat the fluid; and a controller configured to control the heating mechanism to apply a local heating in order to obtain a desired thickness profile of the fluid on the substrate.