| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometric microscopic device which measures phase difference to measure position information.SOLUTION: An apparatus comprises an optical component having an input beam splitter, a first output beam splitter and a second output beam splitter disposed within the optical component, the input beam splitter being configured to receive an optical signal associated with an image having an image plane, the first output beam splitter being configured to let a portion of the optical signal received from the input beam splitter to interfere with a portion of the optical signal received from the second output beam splitter.SELECTED DRAWING: Figure 1 |
