| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus using a pendulum sensor, in which a return operation of the pendulum sensor to a home position is performed more reliably so that occurrence of operation abnormalities can be effectively improved.SOLUTION: In a substrate processing apparatus including a pendulum sensor 1 of the present invention, the pendulum sensor has an ON position where a pendulum body 10 of the pendulum sensor 1 is in a tilted state and an OFF position where the pendulum body returns by deadweight action. The substrate processing apparatus is provided with an OFF position return support mechanism 6 that applies an external force in a direction for returning to the OFF position to the pendulum body 10 at the ON position, the external force becoming small at the OFF position as compared with that at the ON position.SELECTED DRAWING: Figure 1 |
