| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control device capable of improving temperature stability.SOLUTION: A temperature control device 100 comprises: a plurality of heat source devices 10, 20 and 30 which heat or cool fluid; a temperature sensor 8 which measures a temperature of the fluid; and a control section 50 which controls the plurality of heat source devices 10, 20 and 30. The control section 50 performs: a first process to activate a first heat source device 10 among the plurality of heat source devices and to maintain output of a second heat source device 20 among the plurality of heat source devices on the basis of a measurement result of the temperature sensor 8; and a second process, when output of the first heat source device 10 reaches a first output value, to change the output of the second heat source device 20 and to activate the first heat source device 10 in a manner that offsets a change in heat quantity of the fluid due to the change in the output of the second heat source 20. The first heat source device 10 has higher temperature control resolution than the second heat source device 20.SELECTED DRAWING: Figure 1 |
