| 摘要 |
PROBLEM TO BE SOLVED: To provide a scribing apparatus, a scribing method, a holder unit and a holder, capable of forming a highly accurate scribe line, such as a scribe line formed by a scribing point while increasing a usable life.SOLUTION: A scribing apparatus comprises: a holder unit 30 including a scribing wheel 31, a pin 31 for rotatably pivotally supporting the scribing wheel and a holder 40 for holding the pin; a scribing head including a holder joint part for attaching the holder unit and a lifting part for lifting the holder unit; and a table for placing a brittle material substrate. The insertion holes 43a and 43b of the holder are formed to be long in the vertical direction. The scribing wheel is moved upward when contacted with the substrate by lifting the holder unit to be contacted with a rotation suppression part 60 formed in the holder, and the rotation of the scribing wheel is suppressed.SELECTED DRAWING: Figure 4 |
