ETCHING APPARATUS AND MANUFACTURING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an etching apparatus and a manufacturing system that can carry out an etching treatment to a film efficiently.SOLUTION: The etching apparatus includes: a net-like conveyor belt 35a capable of moving while carrying a baked film FB or a porous resin-film F; and an immersion unit 32 for immersing the baked film FB in an etching solution Q1 while conveying the baked film FB by the conveyor belt 35a.SELECTED DRAWING: Figure 1