MANUFACTURING METHOD OF FLEXIBLE SUBSTRATE

摘要

A manufacturing method of a flexible substrate is provided. The method comprises: coating a flexible substrate material and drying it; using a mask to expose the dried flexible substrate material, wherein the mask has a plurality of opaque regions distanced from each other, and the opaque regions form a designed pattern; developing the flexible substrate material to remove a portion of the flexible substrate material except the opaque regions; and curing the flexible substrate material to form a plurality of films comprising the flexible substrate material, which correspond to the designed pattern.

主权项

1. A manufacturing method of a flexible substrate, comprising:
coating a flexible substrate material comprising a photo-sensitive material onto a surface of a glass substrate; vacuum-drying the flexible substrate material; using a mask to expose the dried flexible substrate material, wherein the mask has a plurality of opaque regions which are distanced from each other, and the opaque regions form a designed pattern; developing the exposed flexible substrate material, so as to remove a portion of the flexible substrate material except the opaque regions; and curing the developed flexible substrate material, so as to form a plurality of films comprising the flexible substrate material, and the films correspond to the designed pattern; wherein a distance between each two of the adjacent opaque regions is from 0.5-50 millimeters; the flexible substrate material is Polyimide; the developed Polyimide is cured to form the plurality of films of Polyimide corresponding to the designed pattern; and a thickness of the films of Polyimide is in a range of 10-500 micrometers.