| 摘要 |
PROBLEM TO BE SOLVED: To provide an elastic surface-wave device which is hard to cause the degradation in characteristics even if a piezoelectric material is made a high temperature.SOLUTION: An elastic surface-wave device 1 comprises: a base material 2; and a protection film 3 on one face 21a of the base material 2, which includes a silicon nitride as a primary component. In the elastic surface-wave device 1, a piezoelectric material 21 is covered with the protection film 3 including a silicon nitride as a primary component and thus, the transformation of the piezoelectric material 21 (scandium-containing aluminum nitride) owing to a high temperature is suppressed. As a result, the degradation in characteristics of the elastic surface-wave device 1 owing to transformation of the piezoelectric material 21 (scandium-containing aluminum nitride) is suppressed.SELECTED DRAWING: Figure 1 |
