END BLOCK ARRANGEMENT AND SOCKET ARRANGEMENT

摘要

According to various embodiments, a socket arrangement for holding an end block on a process chamber may include the following: a first socket element with a first fastening arrangement for fastening the first socket element on a process chamber wall and with a second fastening arrangement; and a second socket element with a third fastening arrangement, for fastening the second socket element on the first socket element and with a fourth fastening arrangement for fastening an end block on the second socket element; wherein the second fastening arrangement of the first socket element and the third fastening arrangement of the second socket element may be formed for engaging in one another with play in such a way that the second socket element may be deflectable in relation to the first socket element.

主权项

1. A socket arrangement for holding an end block on a process chamber, the socket arrangement comprising:
a first socket element and a second socket element,
the first socket element comprising: a first fastening arrangement for fastening the first socket element on a process chamber wall and a second fastening arrangement,
the second socket element comprising: a third fastening arrangement for fastening the second socket element on the first socket element and a fourth fastening arrangement for fastening an end block on the second socket element; wherein the second fastening arrangement of the first socket element and the third fastening arrangement of the second socket element are formed for engaging in one another with play so that the second socket element is deflectable in relation to the first socket element.