发明名称 |
Method and Apparatus of Tuning a Scanning Probe Microscope |
摘要 |
An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve. |
申请公布号 |
US2016109477(A1) |
申请公布日期 |
2016.04.21 |
申请号 |
US201514834061 |
申请日期 |
2015.08.24 |
申请人 |
Bruker Nano, Inc. |
发明人 |
Su Chanmin;Silva Paul;Huang Lin;Pittenger Bede;Hu Shuiqing |
分类号 |
G01Q30/04;G01Q60/24 |
主分类号 |
G01Q30/04 |
代理机构 |
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代理人 |
|
主权项 |
1. A method of operating a scanning probe microscope (SPM) comprising:
tuning the SPM to determine an operating frequency of a drive of the SPM by plotting thermal data having a thermal peak on top of a conventional tuning curve; and wherein the tuning curve has two peaks separated by a valley, and wherein the operating frequency is at about a midpoint on a downslope of the valley corresponding to the thermal peak. |
地址 |
Santa Barbara CA US |