| 摘要 |
A measurement system of a tangential force applied by a fluid is provided. The system includes a pipe in which the fluid flows, the pipe includes an inner surface contacting the fluid, and a cavity arranged in the inner surface of the pipe: and a MEMS and/or NEMS device measuring the tangential force including a support, a moving plate suspended from the support by a pivot link, the moving plate including a first face on which the fluid applies a tangential force. The device is fixed to the pipe such that the first face of the moving plate is flush with the inner surface of the pipe. The device includes two piezoresistive strain gauges suspended between the moving plate and the support, the tangential force applying force to the gauges. |
