PIEZOELECTRIC FORCE MEASURING DEVICE HAVING INTEGRATED WEAR-PROTECTION AND ANTI-FRICTIONAL PROPERTIES

摘要

A force measuring device including a crystalline layer with piezoelectric properties. The layer is arranged on at least part of a surface of a solid state actuator (or carrier). The device also includes at least one wear-protection layer with anti-frictional properties. The piezoelectric layer includes crystalline aluminium nitride having a hexagonal crystal structure with a pronounced crystal orientation (002), at least one electrically conductive layer being applied between the surface of the solid-state actuator and the crystalline aluminium nitride layer. The conductive layer is preferably a metal layer consisting of at least one metal, which when oxidized, forms an electrically insulating oxide that is mechanically and thermally more stable than molybdenum(VI) oxide (Mo03).

主权项

1. A force measuring device, comprising a sensor layer system (20) on at least a part of a surface of a substrate (1), and the sensor layer system (20) comprises at least one crystalline layer (10) with piezoelectric properties which is applied to the solid-state actuator and comprises at least one wear-protection layer (15) with anti-frictional properties, wherein the piezoelectric layer (10) consists of crystalline aluminium nitride having a hexagonal crystal structure with pronounced crystal orientation (002), characterized in that at least one electrically conductive layer (5) is applied between the surface of the solid-state actuator (1) and the crystalline aluminium nitride layer (10).