Displacement Measuring Method And Displacement Measuring Device

摘要

A displacement measuring device, comprising a pattern projecting unit, a pattern image pickup unit provided so as to be capable of relatively displacing with respect to the pattern projecting unit and a control unit, wherein the pattern projecting unit is capable of projecting a displacement detecting pattern to the pattern image pickup unit, the pattern image pickup unit is capable of picking up the displacement detecting pattern as projected, the control unit is adopted. to circulate image of the displacement detecting pattern picked up by the pattern image pickup unit to the pattern projecting unit, to update the displacement detecting pattern projected by the pattern projecting unit to the displacement detecting pattern as circulated, and further to project the displacement detecting pattern as updated to the pattern image pickup unit, wherein a relative displacement between the pattern projecting unit and the pattern image pickup unit is obtained by dividing a displacement amount of the displacement detecting pattern in the image acquired by circulation by the number of circulations.

主权项

1. A method to measure displacement in a displacement measuring device, which comprises a pattern projecting unit provided at one site of a part capable of relatively displacing and a pattern image pickup unit provided at the other site, comprising a step of projecting a displacement detecting pattern from said pattern projecting unit to said pattern image pickup unit, a step of circulating said displacement detecting pattern acquired at said pattern image pickup unit to said pattern projecting unit, a step of updating said displacement detecting pattern of said pattern projecting unit by said displacement detecting pattern as circulated, a step of projecting said displacement detecting pattern as updated, and a step of obtaining displacement amount of said displacement detecting pattern in an image acquired by said pattern image pickup unit after circulation and of obtaining a displacement between two sites by dividing said displacement amount by the number of circulations.