END EFFECTOR

摘要

An end effector according to the present invention includes: a hand; a substrate holder provided on the hand; a mapping detector provided at distal end portions and of the hand; a light emitter, which the hand is provided with and which is configured to generate detection light; a light receiver, which the hand is provided with and which is configured to receive the detection light and convert the detection light into an electrical output; and an optical path formed such that the detection light emitted from the light emitter passes through the optical path to be incident on the light receiver; the optical path is formed such that detection light is blocked by a substrate detected in a cassette by the mapping detector, and such that detection light is blocked by a substrate held by the substrate holder.

主权项

1. An end effector comprising:
a hand; a holder provided on the hand and configured to hold a first substrate; a mapping detector provided at a distal end portion of the hand, the mapping detector being configured to face a second substrate stored in a cassette and detect presence or absence of the second substrate; a light emitter, which the hand is provided with and which is configured to convert an electrical input to generate detection light; a light receiver, which the hand is provided with and which is configured to receive the detection light and convert the detection light into an electrical output; and an optical path formed in the hand, through which the detection light emitted from the light emitter passes to be incident on the light receiver, wherein the optical path is formed such that the detection light is blocked by the first substrate held by the holder, and such that the detection light is blocked by the second substrate detected by the mapping detector.