发明名称 |
COMPOSITIONS OF LOW-K DIELECTRIC SOLS CONTAINING NONMETALLIC CATALYSTS |
摘要 |
A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material. The composition can further include a metallic ion at a lower parts-per-million concentration than the nonmetallic catalyst, and/or the composition can further include a cosolvent. A method of preparing a thin film on a substrate using the sol composition is also provided. |
申请公布号 |
US2016111275(A1) |
申请公布日期 |
2016.04.21 |
申请号 |
US201514976995 |
申请日期 |
2015.12.21 |
申请人 |
SBA Materials, Inc. |
发明人 |
Phillips Mark L.F.;Savage Travis |
分类号 |
H01L21/02;C08J9/00;H01L21/768 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
1. A sol composition for producing a porous low-k dielectric material, comprising:
at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material, provided that said nonmetallic catalyst is not a tertiary amine oxide. |
地址 |
San Jose CA US |