GLASS PALLET FOR SPUTTERING SYSTEMS

摘要

Pallets for transporting one or more glass substrates in a substantially vertical orientation through a sputtering system. In some cases, a pallet comprising a frame with an aperture and an adjustable grid array within the aperture. The adjustable grid array is configurable to hold a plurality of glass substrates of different shapes and/or sizes. In one case, the adjustable grid array comprises a system of vertical and horizontal support bars, wherein the vertical support bars configured to both support the plurality of glass substrates at their vertical edges, wherein the horizontal support bars are configured to support the plurality of glass substrates at their horizontal edges, wherein the ends of the horizontal support bars are slideably engaged with the vertical support bars.

主权项

1. A pallet for transporting a plurality of glass substrates through a sputtering apparatus, the pallet comprising:
a frame comprising an aperture; and an adjustable grid array within the aperture, the adjustable grid array configurable to hold the plurality of glass substrates of different shapes and/or sizes; wherein the pallet is configured to hold said plurality glass substrates, each by at least two edges, and in a substantially vertical orientation during transport through the sputtering apparatus.