ELECTRODE ASSEMBLY HAVING PIERCE ELECTRODES FOR CONTROLLING SPACE CHARGE EFFECTS

摘要

An electrode assembly for accelerating or decelerating an ion beam is provided. In one example, the electrode assembly may include a pair of exit electrodes adjacent to an exit opening of the electrode assembly. The pair of exit electrodes may be positioned on opposite sides of a first plane aligned with a first dimension of the exit opening. A pair of pierce electrodes may be adjacent to the pair of exit electrodes. The pair of pierce electrodes may be positioned on opposite sides of a second plane aligned with a second dimension of the exit opening. The second dimension of the exit opening may be perpendicular to the first dimension of the exit opening. Each pierce electrode may include an angled surface positioned such that a dimension of the angled surface forms an angle of between 40 and 80 degrees with respect to the second plane.

主权项

1. An electrode assembly for accelerating or decelerating an ion beam, the electrode assembly comprising:
a first ion beam path extending from a first opening of the electrode assembly to a second opening of the electrode assembly, wherein the first opening and the second opening are disposed on opposite sides of the electrode assembly; a pair of exit electrodes defining a portion of the first ion beam path adjacent to the second opening, the pair of exit electrodes positioned on opposite sides of a first plane aligned with a first dimension of the second opening; and a pair of pierce electrodes defining a portion of the first ion beam path adjacent to the pair of exit electrodes, the pair of pierce electrodes positioned on opposite sides of a second plane aligned with a second dimension of the second opening, wherein: the second dimension of the second opening is perpendicular to the first dimension of the second opening; each pierce electrode of the pair of pierce electrodes has an angled surface facing the first ion beam path; and the angled surface of each pierce electrode is positioned such that a first dimension of the angled surface of each pierce electrode forms an angle of between 40 and 80 degrees with respect to the second plane.