| 摘要 |
This electrostatic chuck device 80 is sequentially provided, in the following order, with: an electrostatic chuck part 2 that has one main surface serving as a stage surface on which a plate-like sample is placed, while containing an internal electrode for electrostatic suction inside; a first bonding layer 4; a sheet material 6; a second bonding layer 8; and a base part 10 for temperature regulation, which regulates the temperature of the electrostatic chuck part 2 to a desired temperature. The first bonding layer 4 comprises a joining layer 14 that has a thickness of 1-500 nm and a silicone adhesive layer 24 that has a thickness of 2-30 μm. The second bonding layer 8 comprises a joining layer 18 that has a thickness of 1-500 nm and a silicone adhesive layer 28 that has a thickness of 2-30 μm. |
