发明名称 PIEZOELECTRIC ELEMENT, LIQUID INJECTION HEAD, AND LIQUID INJECTOR
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of suppressing occurrence of cracking in a piezoelectric layer more reliably, and to provide a liquid injection head and a liquid injector.SOLUTION: A piezoelectric element includes a diaphragm 21 consisting of a first region where deflective deformation is allowable, and a second region on the outside of the first region where deflective deformation is blocked, a piezoelectric element body 19 where a lower electrode layer 27, a piezoelectric layer 28, and an upper electrode layer 29 are laminated, in this order, in the first region of the diaphragm 21, and a common metal layer 30 laminated on the upper electrode layer 29 via a common adhesion layer 35. A part of the piezoelectric element body 19 is extended to the second region and in a region on the extension side, the common metal layer 30 is formed from a position overlapping the first region to a position overlapping the second region, and the common adhesion layer 35 is extended beyond the position overlapping the common metal layer 30 to the end of the upper electrode layer 29.SELECTED DRAWING: Figure 5
申请公布号 JP2016058467(A) 申请公布日期 2016.04.21
申请号 JP20140181910 申请日期 2014.09.08
申请人 SEIKO EPSON CORP 发明人 NAGANUMA YOICHI;HIRAI EIKI;TAKABE HONKI;FUKUZAWA YUMA
分类号 H01L41/047;B41J2/14;H01L41/09;H01L41/113;H01L41/29 主分类号 H01L41/047
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