| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measurement device and a shape measurement method with which it is possible to measure a shape with high accuracy.SOLUTION: A three-dimensional measurement device 1 comprises a command output unit for outputting a measurement command, a path component calculation unit for calculating a path velocity vector, a push direction component calculation unit for calculating a push correction vector, a locus correction component calculation unit for calculating a locus correction vector, a velocity composition unit for calculating a velocity composition vector in which these vectors are combined, and a drive control unit for causing a probe to be driven on the basis of the velocity composition vector. The command output unit outputs a measurement command that includes a probe movement path based on the design data of an object to be measured and a locus correction term coefficient that is set for the angle formed by the push correction vector and the locus correction vector. The velocity composition unit calculates the velocity composition vector in which the locus correction vector corrected by the locus correction term coefficient, the path velocity vector, and the push correction vector are combined.SELECTED DRAWING: Figure 2 |
