发明名称 SHAPE SIMULATION DEVICE, SHAPE SIMULATION METHOD AND SHAPE SIMULATION PROGRAM
摘要 PROBLEM TO BE SOLVED: To appropriately calculate a change in the shape of a substance.SOLUTION: In one embodiment, a shape simulation device includes a dividing part and a calculation part. The dividing part divides a calculation region in the shape of the substance into a plurality of cells and represents the shape of the substance with filled cells which are filled with a predetermined quantity of the substance, and space cells which are not filled with the predetermined quantity of the substance. The calculation part calculates a filling speed of a target cell within the calculation region on the basis of a processing speed of a plurality of neighboring cells which are neighboring to the target cell. Further, the calculation part includes a contribution speed calculation part for calculating a contribution speed of the neighboring cells contributed to the filling speed of the target cell on the basis of the processing speed of the plurality of neighboring cells; and a filling speed calculation part for calculating the filling speed of the target cell on the basis of the contribution speed of the plurality of neighboring cells. Moreover, the contribution speed of each of the neighboring cells which are neighboring to the target cell depends on whether the other cell neighboring to the target cell is a first cell of which a filling rate with the substance belongs to a first range or a second cell of which the filling rate with the substance belongs to a second range that is different from the first range.SELECTED DRAWING: Figure 8
申请公布号 JP2016058705(A) 申请公布日期 2016.04.21
申请号 JP20140186646 申请日期 2014.09.12
申请人 TOSHIBA CORP 发明人 TAMAOKI NAOKI
分类号 H01L21/00;G06F17/50;G06F19/00 主分类号 H01L21/00
代理机构 代理人
主权项
地址