| 摘要 |
PROBLEM TO BE SOLVED: To provide an abrasive slurry which does not cause aggregation in the long term storage of abrasive particles, is excellent in dispersion stability and scratch resistance at polishing and having high abrasive speed.SOLUTION: An abrasive slurry includes the core-shell type abrasive particles in which the core and shell have compositions different from each other. The core of the core-shell type abrasive particles includes as a main component, the oxide of at least one metal element selected from the group of specific metal elements, and the shell includes cerium oxide as a main component and the oxide of at least one metal element selected from the group of specific metal elements as an accessory component. The core and shell include at least one of oxides (including cerium oxide) of the same metal element as each other. Besides, the variation coefficient of a particle size distribution in the core-shell type abrasive particles is 20% or less, and the average value of the zeta potential of the above core-shell type abrasive particles is within the range of -120 to -30 mV.SELECTED DRAWING: Figure 1 |
