| 摘要 |
According to an embodiment of the present invention, an apparatus for leveling a heater desirably comprises: a chamber installed with a shower head therein; a heater unit including a heater block positioned in a lower portion of the shower head and having a substrate which is mounted thereon and a shaft connected to the heater block; and a leveling unit connected to the chamber and the shaft outside the chamber to control a horizontal level of the heater block for a reaction gas sprayed from the shower head to be evenly deposited to the substrate. |
