GAS MANUFACTURING METHOD AND MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a gas manufacturing method which keeps a concentration of a permeable gas component in a product gas higher than a predetermined value and suppresses a concentration of impurities on the non-permeation side of a gas separation membrane.SOLUTION: A gas refinement manufacturing method, which enables a gas separation membrane having selective permeability to be supplied with a gas mixture containing a plurality of gas components of different permeabilities through a first channel 21 as a raw material gas G1 to separate the same into a residual gas G2 recovered from a second channel 22 to be richer in hardly permeable gas components than the raw material gas and a permeable gas G3 recovered from a third channel 23 to be richer in easily permeable gas components than the raw material gas to manufacture at least one of the permeable gas and the residual gas as a product gas, makes a change in a) the ratio Ka of the flow rate of the raw material gas to the flow rate of the residual gas (where Ka is the flow rate of the raw material gas/the flow rate of the residual gas), or a change in b) the ratio Kb of the flow rate of the raw material gas to the flow rate of the permeable gas (where Kb is the flow rate of the raw material gas/the flow rate of the permeable gas).SELECTED DRAWING: Figure 1A