| 摘要 |
PROBLEM TO BE SOLVED: To achieve enhancement of energy accuracy, while avoiding decrease in productivity of an ion implanter.SOLUTION: The energy analysis slit 28 of an ion implanter is configured to be able to switch a standard slit opening 110 for use in the injection processing performed under given injection conditions, and a high accuracy slit opening 112 having an energy accuracy higher than that of the standard slit opening 110, and used for adjusting the acceleration parameters of a high-frequency linear accelerator. The acceleration parameters are determined for the given injection conditions, so that at least some of the ions supplied to the high-frequency linear accelerator are accelerated to a target energy, and the amount of beam current measured by a beam measurement section corresponds to a target amount of beam current.SELECTED DRAWING: Figure 4 |
