System, Method and Apparatus for Improving Accuracy of RF Transmission Models for Selected Portions of an RF Transmission Path

摘要

Systems and methods for determining an RF transmission line model for an RF transmission system includes generating a baseline RF transmission line model characterizing the RF transmission system. A plasma RF voltage, RF current, RF power and/or a corresponding RF induced DC bias voltage is calculated from the baseline RF transmission line model. An end module including the electrostatic chuck, a plasma and an RF return path is added to the baseline RF transmission line model to create one or more revised RF transmission line models. A revised plasma RF voltage, a revised plasma RF current, a revised plasma RF power and/or a corresponding revised RF induced DC bias voltage is calculated from each of the revised baseline RF transmission line models. The revised RF transmission line models are scored to identify a best fitting revised RF transmission line model as a complete RF transmission line model.

主权项

1. Method for determining an RF transmission line model for a complete RF transmission system comprising:
generating a baseline RF transmission line model characterizing the RF transmission system, the baseline RF transmission line model having a plurality of stages ending at an input to an electrostatic chuck; calculating at least one of a plasma RF voltage (Vrf), and/or a plasma RF current (Irf) and/or a plasma RF power (Prf) from the baseline RF transmission line model based on an empirically measured RF induced DC bias voltage; adding an end module to the baseline RF transmission line model to create at least one revised RF transmission line model, the end module including the electrostatic chuck, a plasma and an RF return path; calculating at least one of a revised plasma RF voltage (V′rf) and/or a revised plasma RF current (I′rf) and/or a revised plasma RF power (P′rf) and/or a corresponding revised RF induced DC bias voltage from each of the at least one revised baseline RF transmission line models; scoring each one of the at least one revised RF transmission line models to identify a best fitting revised RF transmission line model; and recording the best fitting revised RF transmission line model as a complete RF transmission line model.