| 摘要 |
FIELD: physics.SUBSTANCE: device for aligning multiple beams includes: a phase shift section, a superposition section, a detecting unit and a phase adjustment section. The phase shift section forms a group of phase-shifted laser beams by performing a phase shift for each beam from the group of laser beams. The superposition section forms a group of laser beams, obtained by superposition, via the superposition of a reference laser beam and each beam from the group of phase-shifted laser beams. The detection section forms interference pattern data for a spatial interference pattern, which appears upon detecting each beam from the group of laser beams obtained by the superposition. The phase adjustment section performs phase shift adjustment based on feedback in the said phase shift section based on the interference pattern data obtained from each beam from the group of laser beams obtained by superposition, and bringing the group of phase-shifted laser beams to the required state.EFFECT: simple design.7 cl, 1 dwg |
