发明名称 |
GLASS PALLET FOR SPUTTERING SYSTEMS |
摘要 |
Pallets for transporting one or more glass substrates in a substantially vertical orientation through a sputtering system. In some cases, a pallet comprising a frame with an aperture and an adjustable grid array within the aperture. The adjustable grid array is configurable to hold a plurality of glass substrates of different shapes and/or sizes. In one case, the adjustable grid array comprises a system of vertical and horizontal support bars, wherein the vertical support bars configured to both support the plurality of glass substrates at their vertical edges, wherein the horizontal support bars are configured to support the plurality of glass substrates at their horizontal edges, wherein the ends of the horizontal support bars are slideably engaged with the vertical support bars. |
申请公布号 |
EP3008224(A1) |
申请公布日期 |
2016.04.20 |
申请号 |
EP20140811203 |
申请日期 |
2014.06.09 |
申请人 |
VIEW, INC. |
发明人 |
FRANK, TREVOR;ROZBICKI, ROBERT T.;SATERN, JASON |
分类号 |
C23C14/34;B65G49/06;H01L21/673 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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