Particle beam system and method for operating the same

摘要

A method of operating a particle beam system comprises determining a deflection amount and a deflection time of a beam deflection module connected to a data network; determining an un-blank time of a beam blanking module connected to the data network; determining a blank time of the beam blanking module connected to the data network; generating a data structure comprising plural data records, wherein each data record includes a command representing an instruction for at least one of the modules, and a command time representing a time at which the instruction is to be sent to the data network; sorting the records of the data structure by command time; generating a set of digital commands based on the data structure; and sending the digital commands of the set to the network in an order corresponding to an order of the sorted records.