发明名称 |
PRODUCTION OF POLYCRYSTALLINE SILICON IN CLOSED-LOOP PROCESSES AND SYSTEMS |
摘要 |
Production of polycrystalline silicon in a substantially closed-loop process is disclosed. The processes generally include decomposition of trichlorosilane produced from metallurgical grade silicon. |
申请公布号 |
EP2630081(B1) |
申请公布日期 |
2016.04.20 |
申请号 |
EP20110761811 |
申请日期 |
2011.09.22 |
申请人 |
MEMC ELECTRONIC MATERIALS, INC. |
发明人 |
BHUSARAPU, SATISH;HUANG, YUE;GUPTA, PUNEET |
分类号 |
C01B33/027;C01B33/03;C01B33/039 |
主分类号 |
C01B33/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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