发明名称 研磨用クッション材
摘要 PROBLEM TO BE SOLVED: To provide a cushion material for polishing exhibiting excellent cushion properties even at polishing at low pressure and capable of retaining an object to be polished and an abrasive flat.SOLUTION: In the cushion material for polishing, an adhesive layer 12a is integrally laminated on one of surfaces of a foamed sheet 11, and the foamed sheet 11 satisfies at least one of conditions that a thickness is 0.3 to 3.0 mm, density is 400 to 600 kg/m, tensile strength is 1.0 to 3.0 MPa, elongation is 130 to 160%, Shore (A) hardness is 25 to 40, and compression stress at 25% is 0.30 to 0.60 MPa.
申请公布号 JP5905698(B2) 申请公布日期 2016.04.20
申请号 JP20110223146 申请日期 2011.10.07
申请人 積水化学工業株式会社 发明人 松井 梨絵
分类号 B24B37/24;B24B37/11;B24B37/22;H01L21/304 主分类号 B24B37/24
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