发明名称 動いている基板の形状変化を検出する方法および装置
摘要 A method is disclosed for detecting a change in shape of a continuous substrate, the method comprising providing a continuous substrate continuously moving through a measurement zone, providing an optical position sensor in optical communication with at least a portion of the measurement zone, irradiating at least a portion of the continuous substrate within at least a portion of the measurement zone with laser radiation and detecting a reflection of the laser radiation, and then determining a distance between the irradiated portion of the continuous substrate and the optical position sensor.
申请公布号 JP5906288(B2) 申请公布日期 2016.04.20
申请号 JP20140162165 申请日期 2014.08.08
申请人 コーニング インコーポレイテッド 发明人 ショーン アール マークハム
分类号 G01B11/16;C03B17/06;C03B25/12 主分类号 G01B11/16
代理机构 代理人
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