| 摘要 |
In the present invention, there is disclosed a display device displaying by charged particle beam and detecting signal charged particles by multipurpose selective detector with at least one continuous active surface for the detection of a charged particle beam, comprising at least secondary electrons or reflected electrons, wherein at least one active surface of the detector comprises at least one blind region. The display device of the present invention further comprises a charged particle source generating a primary beam of the charged particles, an optical system of diaphragms and lenses serving for formation and optimization of the charged particle primary beam, a system of deflectors for deflecting the charged particle primary beam and for raster scanning by the charged particle primary beam upon a sample, an objective lens focusing the charged particle primary beam, and energy separator, which deflects a signal beam of the charged particles to one or more directions from the display device optical axis such that the charged particle primary beam passing through said charged particle energy separator is not deflected. Further, it comprises at least one auxiliary detector of the signal beam of the charges particles, situated inside the display device tube. |
