发明名称 MAGNETIC SENSOR AND METHOD FOR DETECTING MAGNETISM THEREOF
摘要 The present invention relates to a magnetic sensor and a magnetic detecting method of the same capable of detecting at least a magnetic field perpendicular to a substrate and a magnetic field parallel to the substrate in a state where the respective magnetic field components are mixed and separable. One embodiment of the magnetic sensor detects a magnetic field of the orthogonal three axes, and includes a magnetic detector (50a or 50b) including a magnetic field sensitive material configured to detect a magnetic field component in a first direction, a magnetic field direction converters (60a, 60b) configured to convert a magnetic field component in a second direction and a magnetic field component in a third direction into magnetic field components in the first direction, the second direction being perpendicular to the first direction, the third direction being perpendicular to both of the first and the second directions.
申请公布号 EP2878966(A4) 申请公布日期 2016.04.20
申请号 EP20140773348 申请日期 2014.03.24
申请人 ASAHI KASEI MICRODEVICES CORPORATION 发明人 YAMASHITA, MASAYA;YAMAGATA, YO;TANAKA, KEN;MIKOSHIBA, NORIHIKO
分类号 G01R33/09;H01L43/08 主分类号 G01R33/09
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