| 摘要 |
FIELD: physics.SUBSTANCE: invention can be used for making superconducting radiation sensors. This invention consists in that the method of producing superconducting multiple optical detectors including formation of separate sections of superconducting nanowire, forming a pattern in the form of meander, and superconducting connecting leads for connection of sections through current limiters to contact pads, current limiters formed by application to the formed structure protective resistive mask, opening windows in the above sections connecting wires meander with contact site and conversion into conducting ones due to selective change of atomic composition of the effect of the beam of accelerated particles through protective mask.EFFECT: design of a nanoresistors with high performance characteristics and fewer process operations.8 cl, 4 dwg |
