发明名称 積層体の製造方法、および積層体
摘要 The present invention relates to a method for manufacturing a laminated body, in which a laminated body is obtained by applying chamfering to the side edges of a laminated body block comprising a substrate and a reinforcing plate, the reinforcing plate having a resin layer and a support plate. The method for manufacturing a laminated body has a grinding step in which the side edges of the laminated body block are ground using a circular-plate-shaped or cylindrical rotating grinding stone, and in the grinding step, the grinding surface of the grinding stone is brought into diagonal contact with the interface between the resin layer and the substrate and with the interface between the resin layer and the support plate.
申请公布号 JP5907168(B2) 申请公布日期 2016.04.20
申请号 JP20130521516 申请日期 2012.06.01
申请人 旭硝子株式会社 发明人 我妻 明
分类号 B24B9/00;H01L21/304 主分类号 B24B9/00
代理机构 代理人
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