发明名称 |
MEMS DEVICE AND METHOD OF FABRICATION |
摘要 |
A MEMS device, and method of fabrication thereof, comprising: a wall arranged as a closed loop(for example, comprising a plurality of interconnected lengths (11-18)); and a bridging portion (54) having two ends and an intermediate portion between these ends; the bridging portion (54) is connected at one end to a first portion of the wall and at the other end to a second portion of the wall non-contiguous to the first; whereby when the intermediate portion is displaced in a direction through a plane defined between the two ends, the portions of the wall connected to the bridging portion (54) are each displaced in a respective direction in the plane, and at least one further portion of the wall is displaced in a direction that is in the plane and that is different to the directions that the two portions connected to the bridging portion (54) are displaced in. |
申请公布号 |
EP2504274(B1) |
申请公布日期 |
2016.04.20 |
申请号 |
EP20100787532 |
申请日期 |
2010.11.22 |
申请人 |
BAE SYSTEMS PLC |
发明人 |
ELEY, REBECKA;HUCKER, MARTYN JOHN;STURLAND, IAN MICHAEL |
分类号 |
B81B3/00;H01L41/09;H01L41/22 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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