Ultraviolet light generating target, electron-beam-excited ultraviolet light source, and method for producing ultraviolet light generating target

摘要

An ultraviolet light generating target 20 includes a substrate 21 made of sapphire, quartz, or rock crystal; and a light-emitting layer 22 that is provided on the substrate 21 and that generates ultraviolet light upon receiving an electron beam. The light-emitting layer 22 includes powdered or granular Pr:LuAG crystals. By using such a light-emitting layer 22 as the target, the ultraviolet light generating efficiency can be increased more remarkably than when a Pr:LuAG single crystal film is used.

主权项

1. An electron-beam-excited ultraviolet light source, comprising:
an ultraviolet light generating target including a substrate made of sapphire, quartz, or rock crystal, and a light-emitting layer provided on the substrate and generating ultraviolet light upon receiving an electron beam; an electron source providing an electron beam to the ultraviolet light generating target; and a vacuum-pumped container in which the ultraviolet light generating target and the electron source are arranged, wherein the light-emitting layer includes powdered or granular Pr:LuAG crystals, the electron beam is incident on the light-emitting layer through a conductive film, and the ultraviolet light generated in the light-emitting layer output from the substrate.