Spatial frequency reproducing apparatus and optical distance measuring apparatus

摘要

A spatial frequency reproducing apparatus includes a light source, a first means for modulating a light emitted from the light source into two lights having different frequencies and separately irradiated adjacently, a second means for two-dimensionally scanning the two lights, a third means for irradiating an object under measurement with the two lights, a fourth means for receiving and converting into an electrical signal at least two or more divided lights from the object under measurement with a boundary line being interposed therebetween in a direction substantially perpendicular to the direction separating the two lights, a fifth means for amplifying respective photoelectrically converted electrical signals while varying a degree of amplification according to frequencies thereof and generating a difference signal or a summation signal of the amplified signals, and a sixth means for obtaining a phase difference or an intensity difference of these signals to obtain a measurement value.

主权项

1. A spatial frequency reproducing apparatus, comprising:
a light source emitting a coherent light; a first means for modulating the light emitted from the light source into two lights which have frequencies different from each other and are irradiated separately adjacent to each other; a second means for one-dimensionally or two-dimensionally scanning the two lights; a third means for irradiating an object under measurement with the two lights which are scanned; a fourth means for receiving and converting into an electrical signal at least two or more divided lights from the object under measurement with a boundary line being interposed therebetween in a direction substantially perpendicular to the direction in which the two lights are separated; a fifth means for amplifying respective electrical signals photoelectrically converted by the fourth means with respect to respective areas with the boundary line being interposed therebetween while varying a degree of amplification according to frequencies of the electrical signals and generating a difference signal or a summation signal of the amplified signals; and a sixth means for obtaining a phase difference or an intensity difference of the difference signal or the summation signal to obtain a measurement value.