Cylinder preparation for high purity acetylene

摘要

This invention relates in part to a method for preparing a pressure vessel for receiving high purity acetylene at elevated pressure. The method involves providing a porous filler-containing pressure vessel, deep cleaning the porous filler-containing pressure vessel, purifying a solvent, and charging the purified solvent into the deep cleaned, porous filler-containing pressure vessel. The pressure vessel is then charged with high purity acetylene for storage, transport and/or delivery of the high purity acetylene. The high purity acetylene may be useful as a source material for depositing carbon and carbon-containing films in semiconductor applications.

主权项

1. A method for storing, transporting and/or delivering high purity acetylene at elevated pressure in a pressure vessel, said method comprising:
providing a porous filler-containing pressure vessel; deep cleaning the porous filler-containing pressure vessel; purifying a solvent by vacuum degassing said solvent in a vacuum container containing said solvent and vapor space above said solvent; charging the purified solvent into the deep cleaned, porous filler-containing pressure vessel to provide said pressure vessel; charging said pressure vessel with high purity acetylene at elevated pressure; and storing, transporting and/or delivering said high purity acetylene at elevated pressure in said pressure vessel.