Exposure apparatus, exposure method, and method for producing device

摘要

An exposure apparatus exposes a substrate by irradiating exposure light on the substrate through liquid. The exposure apparatus has a substrate holder for holding the substrate, a substrate stage capable of moving the substrate held by the substrate holder, and a temperature adjusting system for adjusting the temperature of the substrate holder. The temperature of the substrate is controlled so that there is no difference in temperature between the substrate and the liquid, thereby preventing a reduction in exposure accuracy resulting from variation in temperature of the liquid.

主权项

1. A liquid immersion exposure apparatus comprising:
a projection system; an immersion area forming member having a liquid supply inlet and a liquid recovery outlet, the immersion area forming member having an opening through which an exposure beam is projected, the immersion area forming member forming a liquid immersion area on a portion of a surface of a substrate during exposure of the substrate; a substrate stage system having a first substrate holding member by which the substrate is held, the substrate stage system moving the substrate held by the first substrate holding member below and relative to the projection system and the immersion area forming member; a first temperature sensor provided at the first substrate holding member of the substrate stage system; a first temperature adjustment system which performs temperature adjustment for the first substrate holding member, a part of the first temperature adjustment system being provided at the first substrate holding member; a second temperature adjustment system connected to a liquid supply apparatus, the second temperature adjustment system performing temperature adjustment for liquid delivered from the liquid supply apparatus, the temperature-adjusted liquid being supplied from the liquid supply inlet of the immersion area forming member; and a controller which controls the first and second temperature adjustment systems, wherein the controller controls a temperature adjustment operation based on a measurement result of the first temperature sensor such that a temperature of the liquid to be supplied from the liquid supply inlet is substantially the same as a temperature of the substrate held by the first substrate holding member, and wherein during the exposure, the substrate held by the first substrate holding member is exposed with the exposure beam through the liquid supplied from the liquid supply inlet of the immersion area forming member.